Model
|
UVE-5KC (Manual Collimated)
|
UVIA-5KD (Automated Collimated)
|
| System Lamp |
5.0 KW x 1pcs |
5.0 KW x 2pcs |
|
Mercury Xenon short arc |
Mercury Xenon short arc |
| Collimation Half Angle |
<1.5 degree |
<1.5 degree |
| Declination Half Angle |
<1 degree max. |
<1 degree max. |
| Exterior Dimension (mm) (LxWxH) |
3230x1260x2192 |
3260x2430x2250 |
| Effective Exposure Area (mm) |
508 x 610 (20" x 24") |
508 x 610 (20" x 24") |
| Substrate Size |
up to 20" x 24" |
12"x14" to 20" x 24" |
| Subrate Thickness |
up to 3 mm |
0.15 to 3.175mm |
| Exposure Uniformity |
+/-10% |
+/-10% |
| Intensity |
20 mW/cm2 @365 nm |
20 mW/cm2 @365 nm |
| Lamp Cooling |
Air cooling |
Air cooling |
|
20 CMM (750 CFM*1) |
20CMM (750 CFM*2) |
|
Class 1000 HEPA air filter |
Class 1000 HEPA air filter |
| Exposure Control |
PLC, LCD touch screen panel |
Industrial PC with PLC |
|
|
Windows graphic with touch screen control |
| Alignment Method |
CCD with manual alignment |
Dual-target CCD monitoring system |
| Alignment accuracy |
+/-0.01 mm |
+/-0.01mm |
| Panel Processing Capacity |
240 |
panels/hr |
| Weight |
2420 lbs |
3300 lbs |
| Utilities |
|
|
|
Power |
220 VAC, 3 phases |
220VAC, 3 phases |
|
60Hz, 10KVA |
60Hz, 13KVA |
|
Compressed Air |
70 PSI |
70 PSI |